Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Martin Steuber0
Peter Wiedemuth0
Sven Axenbeck0
Lothar Wolf0
Markus Bannwarth0
Date of Patent
December 29, 2009
Patent Application Number
11612655
Date Filed
December 19, 2006
Patent Primary Examiner
Patent abstract
An arc detection means for detecting arcs in a plasma process includes at least one comparator to which an evaluation signal such as an output signal or an internal signal of an AC generator relating to the output signal and a reference value are supplied. The comparator is connected to a logic component that generates a signal for an arc suppression device.
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