Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Teruo Oda0
Date of Patent
January 5, 2010
Patent Application Number
12000462
Date Filed
December 13, 2007
Patent Primary Examiner
Patent abstract
A semiconductor device includes: a semiconductor substrate; a flow sensor having a first heater for detecting a flow rate of fluid; and a humidity sensor for detecting a humidity of the fluid. The flow sensor and the humidity sensor are disposed on the semiconductor substrate. The flow sensor is disposed around the humidity sensor. The humidity sensor is disposed on an upstream side of the first heater. Since the device includes the humidity sensor, moisture in the fluid is compensated so that detection accuracy of the flow rate is improved.
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