Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Konami Izumi0
Mayumi Yamaguchi0
Date of Patent
January 5, 2010
0Patent Application Number
114244560
Date Filed
June 15, 2006
0Patent Primary Examiner
Patent abstract
It has been difficult to manufacture a semiconductor device equipped with a microstructure having a space, an electric circuit for controlling the microstructure, and the like over one substrate.
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