Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Ryoji Watanabe0
Masaru Takeshita0
Date of Patent
January 12, 2010
Patent Application Number
12064288
Date Filed
August 16, 2006
Patent Primary Examiner
Patent abstract
A positive resist composition and method of forming a resist pattern are provided which enable formation of a resist pattern having excellent shape with reduced LWR.
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