Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Willy Michel0
Daniel Delprat0
Sebastien Kerdiles0
Walter Schwarzenbach0
Date of Patent
January 12, 2010
Patent Application Number
11873311
Date Filed
October 16, 2007
Patent Primary Examiner
Patent abstract
The invention relates to improvements in a method for molecularly bonding first and second substrates together by placing them in surface to surface contact. The improvement includes, prior to placing the substrates in contact, cleaning the surface of one or both of the substrates in a manner to provide a cleaned surface that is slightly roughened compared to a conventionally polished surface, and heating at least one or both of the substrates prior to placing the substrates in contact while retaining the heating at least until the substrates are in surface to surface contact.
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