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US Patent 7648760 Microstructure and method of manufacturing the same
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Patent
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Date Filed
February 5, 2007
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Date of Patent
January 19, 2010
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Patent Application Number
11702189
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Patent Inventor Names
Yusuke Hatanaka
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Akio Uesugi
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Tadabumi Tomita
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Yoshinori Hotta
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Patent Jurisdiction
United States Patent and Trademark Office
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Patent Number
7648760
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Patent Primary Examiner
Ling Xu
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