US Patent 7648767 Material composition for nano- and micro-lithography
Patent 7648767 was granted and assigned to Dow Corning on January, 2010 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
June 1, 2005
0
Date of Patent
January 19, 2010
0
Patent Application Number
10598943
0
Patent Inventor Names
Xing Cheng
0
Lingjie Jay Guo
0
Peng Fei Fu
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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