Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Liang-Choo Hsia0
Qunying Lin0
Sia Kim Tan0
Date of Patent
January 19, 2010
0Patent Application Number
113072450
Date Filed
January 27, 2006
0Patent Primary Examiner
Patent abstract
A phase shifting photolithography system includes inserting a phase shift component in a path of an illumination, wherein the phase shift component modifies a portion of the illumination to a different, and controlling an aperture shutter of the phase shift component modifying an interference of the illumination and the illumination with the different phase.
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