Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Yao-Ting Wang0
Chi-Ming Tsai0
Fang-Cheng Chang0
Lai-Chee Man0
Date of Patent
January 26, 2010
0Patent Application Number
110964690
Date Filed
April 1, 2005
0Patent Primary Examiner
Patent abstract
A Wafer Image Modeling and Prediction System (“WIMAPS”) is described that includes systems and methods that generate and/or apply models of resolution enhancement techniques (“RET”) and printing processes in integrated circuit (“IC”) fabrication. The WIMAPS provides efficient processes for use by designers in predicting the RET and wafer printing process so as to allow designers to filter predict printed silicon contours prior to application of RET and printing processes to the circuit design.
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