US Patent 7655509 Silicide-silicon oxide-semiconductor antifuse device and method of making

Patent 7655509 was granted and assigned to SanDisk on February, 2010 by the United States Patent and Trademark Office.

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Patent

Patent attributes

Current Assignee

SanDisk

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

76555090

Patent Inventor Names

S. Brad Herner0

Date of Patent

February 2, 2010

Patent Application Number

118986220

Date Filed

September 13, 2007

Patent Primary Examiner

‌

Thanhha Pham

Patent abstract

An antifuse contains a first silicide layer, a grown silicon oxide antifuse layer on a first surface of the first silicide layer, and a first semiconductor layer having a first surface in contact with the antifuse layer.

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