US Patent 7656252 Micro-electro-mechanical-system (MEMS) resonator and manufacturing method thereof
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Patent abstract
A micro-electro-mechanical-system resonator, includes: a substrate; a fixed electrode formed on the substrate; and a movable electrode, arranged facing the fixed electrode and driven by an electrostatic attracting force or an electrostatic repulsion force that acts on a gap between the fixed electrode and the movable electrode. An internal surface of a support beam of the movable electrode facing the fixed electrode has an inclined surface.
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US Patent 07656252 Micro-electro-mechanical-system (MEMS) resonator and manufacturing method thereof US Patent 7656252 Micro-electro-mechanical-system (MEMS) resonator and manufacturing method thereof
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Patent Number
0765625200
Patent Number
765625200
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Patent Jurisdiction
Patent Number
076562520
Date of Patent
February 2, 2010
0Patent Application Number
115611460
Date Filed
November 17, 2006
0Official Website
Patent Primary Examiner
Edits on 26 Sep, 2022
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Infobox
Is a
Patent Jurisdiction
Patent Number
076562520
Date of Patent
February 2, 2010
0Patent Application Number
115611460
Date Filed
November 17, 2006
0Official Website
Patent Primary Examiner
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US Patent 07656252 Micro-electro-mechanical-system (MEMS) resonator and manufacturing method thereof
Infobox
Is a
Patent jurisdiction
Patent number
07656252
Date of patent
February 2, 2010
Patent application number
11561146
Date Filed
November 17, 2006
Patent primary examiner
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