US Patent 7658801 Heat treatment apparatus
Patent 7658801 was granted and assigned to Tokyo Electron on February, 2010 by the United States Patent and Trademark Office.
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Patent abstract
A heating means is disclosed which comprises a reflector plate composed of an opaque quartz and a quartz tube welded to the surface of the reflector plate. A carbon wire which generates heat when a current is applied is inserted in the quartz tube.
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Patent Inventor Names
Junichi Arami0
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US Patent 07658801 Heat treatment apparatus US Patent 7658801 Heat treatment apparatus
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Patent Number
076588010
Patent Number
76588010
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Official Website
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Is a
Current Assignee
Patent Jurisdiction
Patent Number
076588010
Date of Patent
February 9, 2010
0Patent Application Number
105610170
Date Filed
June 22, 2004
0Official Website
Patent Primary Examiner
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US Patent 07658801 Heat treatment apparatus
Infobox
Is a
Current assignee
Patent jurisdiction
Patent number
07658801
Date of patent
February 9, 2010
Patent application number
10561017
Date Filed
June 22, 2004
Patent primary examiner
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