Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Yoshiharu Hirakata0
Ryota Imahayashi0
Shuji Fukai0
Tetsuji Ishitani0
Date of Patent
February 9, 2010
Patent Application Number
11011060
Date Filed
December 15, 2004
Patent Primary Examiner
Patent abstract
In manufacturing a device using an organic TFT, it is essential to develop an element in which a channel length is short or a channel width is narrow to downsize a device. Based on the above, it is an object of the present invention to provide an organic TFT in which characteristic is improved. In view of the foregoing problem, one feature of the present invention is that an element is baked after an organic semiconductor film is deposited. More specifically, one feature of the present invention is that the organic semiconductor film is heated under atmospheric pressure or under reduced pressure. Moreover, a baking process may be carried out in an inert gas atmosphere.
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