Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Alvin J. Joseph0
Anthony K. Stamper0
Mete Erturk0
Date of Patent
February 9, 2010
Patent Application Number
12371662
Date Filed
February 16, 2009
Patent Primary Examiner
Patent abstract
A ground shield is disclosed that includes a ‘cheesed’ metal positioned within a dielectric layer and a metal region positioned within a first metal level over the cheesed metal. The ground shield can have different forms depending on the metal used, and provisions are made to prevent diffusion of copper (Cu) when that is used as the metal in the cheese metal of the ground shield. The ground shield provides a low resistance, very thick metal at a first metal (M1) level for passive RF elements in conjunction with the standard back-end-of-line (BEOL) integration. The invention also includes a method of forming the ground shield.
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