US Patent 7660687 Robust measurement of parameters
Patent 7660687 was granted and assigned to KLA-Tencor on February, 2010 by the United States Patent and Trademark Office.
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Patent abstract
A method of increasing consistency between separate parametric measurement readings that are taken with an electron beam imaging tool at different times within a period of time, by correcting drift in the imaging tool at a time frequency that is less than a time period during which the drift is anticipated to be undesirably large.
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US Patent 07660687 Robust measurement of parameters US Patent 7660687 Robust measurement of parameters
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Patent Number
0766068700
Patent Number
766068700
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Infobox
Is a
Current Assignee
Patent Jurisdiction
Patent Number
076606870
Date of Patent
February 9, 2010
0Patent Application Number
114202430
Date Filed
May 25, 2006
0Official Website
Patent Primary Examiner
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Infobox
Is a
Current Assignee
Patent Jurisdiction
Patent Number
076606870
Date of Patent
February 9, 2010
0Patent Application Number
114202430
Date Filed
May 25, 2006
0Official Website
Patent Primary Examiner
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US Patent 07660687 Robust measurement of parameters
Infobox
Is a
Current assignee
Patent jurisdiction
Patent number
07660687
Date of patent
February 9, 2010
Patent application number
11420243
Date Filed
May 25, 2006
Patent primary examiner
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