Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Osamu Kumasaka0
Osamu Kasono0
Date of Patent
February 16, 2010
0Patent Application Number
118130040
Date Filed
November 22, 2005
0Patent Citations Received
Patent Primary Examiner
Patent abstract
A recording device including a beam deflection section for relatively moving an irradiation position of an exposure beam with respect to a substrate on which a resist layer is formed; a substrate velocity adjustment section for adjusting a moving velocity of the substrate based on a deflection amount of the exposure beam; and a deflection control section for controlling to change a deflection velocity of the exposure beam during exposure of the recording signals according to the moving velocity of the substrate.
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