Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Bakak Heidari0
Date of Patent
March 2, 2010
Patent Application Number
11305157
Date Filed
December 19, 2005
Patent Citations Received
Patent Primary Examiner
Patent abstract
The invention relates to an imprint apparatus for carrying out a two-step process for transferring a pattern from a template to a target surface of a substrate. The apparatus works by creating an intermediate disc, e.g. from a flexible polymer stamp, by imprint from the template in a first imprint unit. A feeder device is then operated to feed the intermediate stamp to a second imprint unit, where it is used to make an imprint in a target surface of a substrate.
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