Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Judocus Marie Dominicus Stoeldraijer0
Johannes Anna Quaedackers0
Johannes Wilhelmus De Klerk0
Jozef Maria Finders0
Alexander Serebryakov0
Date of Patent
March 2, 2010
Patent Application Number
11582566
Date Filed
October 18, 2006
Patent Primary Examiner
Patent abstract
A method for improving the uniformity of a lithographic process. In one aspect, the probability density function of a first and second lithographic apparatus are matched by providing a continuous z-motion to a stage in the first lithographic apparatus during substrate exposure. Preferably, the z-motion is characterized by a normally distributed function, wherein the effective probability density function of the first apparatus is substantially similar to the probability density function of the second apparatus.
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