US Patent 7670956 Beam-induced etching
Patent 7670956 was granted and assigned to FEI Company on March, 2010 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
April 8, 2005
0
Date of Patent
March 2, 2010
0
Patent Application Number
11102602
0
Patent Inventor Names
Michel Rossi
0
Xavier Multone
0
Tristan Bret
0
Patrik Hoffmann
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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