US Patent 7672047 Catadioptric projection objective
Patent 7672047 was granted and assigned to Carl Zeiss SMT on March, 2010 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
April 9, 2008
0
Date of Patent
March 2, 2010
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Patent Application Number
12099882
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Patent Inventor Names
Hans-Juergen Mann
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David Shafer
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Wilhelm Ulrich
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Rudolf Von Buenau
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Alexander Epple
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Aurelian Dodoc
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Patent Jurisdiction
Patent Number
Patent Primary Examiner
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