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US Patent 7672110 Electrostatic chuck having textured contact surface

Patent 7672110 was granted and assigned to Applied Materials on March, 2010 by the United States Patent and Trademark Office.

OverviewStructured DataIssuesContributorsActivity
Is a
Patent
Patent
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Current Assignee
Applied Materials
Applied Materials
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Date Filed
August 29, 2005
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Date of Patent
March 2, 2010
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Patent Application Number
11214286
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Patent Citations Received
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US Patent 11923233 Dual-function wafer backside pressure control and edge purge
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US Patent 11680308 Plasma erosion resistant rare-earth oxide based thin film coatings
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US Patent 11756819 Methods and apparatus for minimizing substrate backside damage
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US Patent 11773479 Plasma erosion resistant thin film coating for high temperature application
Patent Inventor Names
Jennifer Y. Sun
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Allen Fox
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James Dempster
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Semyon L. Kats
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
7672110
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Patent Primary Examiner
Stephen W. Jackson
Stephen W. Jackson
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