Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Yung-Shun Pan0
Date of Patent
March 9, 2010
0Patent Application Number
118893760
Date Filed
August 13, 2007
0Patent Primary Examiner
Patent abstract
A photomask cleaner includes a clamp assembly using clamping plates with an elastic buffer device for clamping a photomask to be cleaned positively, a displacement mechanism for moving the clamp assembly among workstations subject to a predetermined track, a cleaning unit installed in one workstation for cleaning the photomask carried by the clamp assembly, and an air dryer installed in one workstation for drying the well-cleaned photomask carried.
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