Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Mamoru Miyawaki0
Jiang-Rong Cao0
Date of Patent
March 9, 2010
0Patent Application Number
115003210
Date Filed
August 8, 2006
0Patent Primary Examiner
Patent abstract
A method of manufacturing a periodic grating structure for a component. The method includes forming first structured layer including a final periodic grating structure of a first material and a second material filling spaces between individual features of the final periodic grating structure, removing the second material using a first chemical process and annealing a portion of the first material into a third material using a second chemical process.
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