Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Yi-Wei Chen0
Chen-Yueh Li0
Ming-Yan Chen0
Date of Patent
March 9, 2010
0Patent Application Number
120250570
Date Filed
February 4, 2008
0Patent Primary Examiner
Patent abstract
A semiconductor device and a manufacturing method thereof are provided. The manufacturing method can form a structure of a thin film transistor (TFT) having a symmetric lightly doped region, and thus provide superior operation reliability and electrical performance. In addition, the manufacturing method forms gate patterns of different TFTs by the same mask process and thereby avoids the misalignment of masks so as to improve the processing yield and reduce the manufacturing cost.
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