Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Kuo-Yuan Chu0
Ping-Yen Huang0
Mao-Hsung Chang0
Wuu-Jyh Lin0
Ting-Shien Duh0
Dow-Che Chen0
Jenn-Tzong Chen0
Date of Patent
March 16, 2010
0Patent Application Number
115009360
Date Filed
August 9, 2006
0Patent Primary Examiner
Patent abstract
A liquid and a gas is constantly filled into a target chamber of a target. Then the liquid and the gas flow around the chamber and are flown out. By doing so, the target is effectively cooled down.
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