Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Mayumi Yamaguchi0
Konami Izumi0
Date of Patent
March 23, 2010
0Patent Application Number
114203440
Date Filed
May 25, 2006
0Patent Primary Examiner
Patent abstract
A microstructure which forms a micromachine is formed by using a silicon wafer as a mainstream, conventionally. In view of this, the invention provides a manufacturing method of a micromachine in which a microstructure is formed over an insulating substrate.
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