Is a
Patent attributes
Current Assignee
0
Patent Jurisdiction
Patent Number
Patent Inventor Names
Gary Allen Hart0
Robert LeRoy Maier0
Jue Wang0
Date of Patent
March 23, 2010
0Patent Application Number
122670050
Date Filed
November 7, 2008
0Patent Citations Received
Patent Primary Examiner
Patent abstract
The invention is directed to preparing optical elements having a thin, smooth, dense coating or film thereon, and a method for making such coating or film. The coated element has a surface roughness of <1.0 nm rms. The coating materials include hafnium oxide or a mixture of hafnium oxide and another oxide material, for example silicon dioxide. The method includes the use of a reverse mask to deposit the coating or film on a rotating substrate.
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