Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Yu-Chong Tai0
James D. Weiland0
Mark Humayun0
Wen Li0
Damien C. Rodger0
Date of Patent
March 23, 2010
0Patent Application Number
112723820
Date Filed
November 10, 2005
0Patent Citations Received
Patent Primary Examiner
Patent abstract
This invention relates to the design and fabrication of micro electromechanical systems (MEMS) for applications in such varied fields as the biomedical, micro-fluidics and chemical analysis fields.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.