US Patent 7685965 Apparatus for shielding process chamber port
Patent 7685965 was granted and assigned to Lam Research on March, 2010 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
January 26, 2006
Date of Patent
March 30, 2010
Patent Application Number
11341079
Patent Citations Received
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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