Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Takahisa Yoshioka0
Masaki Tsujimoto0
Date of Patent
March 30, 2010
0Patent Application Number
105772580
Date Filed
October 21, 2004
0Patent Primary Examiner
Patent abstract
There is provided a sheet peeling apparatus and a peeling method using a plurality of peeling units. A sheet peeling apparatus for peeling off a sheet stuck on the surface of a semiconductor wafer by using an adhesive tape of a width narrower than that of the sheet, which is equipped with a peeling head for peeling off the sheet by pulling the adhesive tape in an obtuse angled direction in a state stuck to the end portion of the sheet; and first and second rollers for peeling off the sheet by pulling the adhesive tape in the substantially right angle or acute angle direction in a state stuck with the adhesive tape in the direction across the sheet. Either of the peeling units are selectively used in accordance with the type of the sheet.
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