Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Date of Patent
March 30, 2010
Patent Application Number
10955601
Date Filed
September 29, 2004
Patent Primary Examiner
Patent abstract
Systems and techniques involving optical coatings for semiconductor devices. An implementation includes a substantially isotropic, heterogeneous anti-reflective coating having a substantially equal thickness normal to any portion of a substrate independent of the orientation of the portion.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.
