Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Jae Young Choi0
Date of Patent
March 30, 2010
0Patent Application Number
118521780
Date Filed
September 7, 2007
0Patent Primary Examiner
Patent abstract
The present invention relates to a semiconductor device, comprising a plurality of word lines arranged on a semiconductor substrate, wherein plurality of word lines are grouped into groups of two word lines, a spacer dielectric layer formed between each group of two word lines, and an interlayer dielectric layer formed so as to fill the area between the word lines in each group of two word lines and cover the word lines and the spacer dielectric layers.
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