Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
March 30, 2010
Patent Application Number
12115395
Date Filed
May 5, 2008
Patent Primary Examiner
Patent abstract
A microelectromechanical (MEMS) device is presented which comprises a metallized semiconductor. The metallized semiconductor can be used for conductor applications because of its low resistivity, and for transistor applications because of its semiconductor properties. In addition, the metallized semiconductor can be tuned to have optical properties which allow it to be useful for optical MEMS devices.
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