Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
April 6, 2010
Patent Application Number
11727002
Date Filed
March 23, 2007
Patent Primary Examiner
Patent abstract
A resist composition comprising at least one kind of a nitrogen-containing compound selected from the group consisting of an amine compound having a phenoxy group, an ammonium salt compound having a phenoxy group, an amine compound having a sulfonic acid ester group and an ammonium salt compound having a sulfonic acid ester group; and a pattern forming method using the composition.
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