US Patent 7695632 Critical dimension reduction and roughness control
Patent 7695632 was granted and assigned to Lam Research on April, 2010 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
May 31, 2005
0
Date of Patent
April 13, 2010
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Patent Application Number
11142509
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Patent Inventor Names
Peter Cirigliano
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S.M. Reza Sadjadi
0
Robert Charatan
0
Zhisong Huang
0
Sangheon Lee
0
Dae-Han Choi
0
Jisoo Kim
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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