US Patent 7695893 Photo-sensitive compound and photoresist composition including the same
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Patent abstract
Disclosed are a photo-sensitive compound and a photoresist composition containing the same, for forming ultra-fine photoresist patterns. The photo-sensitive compound is resented by following Formula 1,
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US Patent 07695893 Photo-sensitive compound and photoresist composition including the same US Patent 7695893 Photo-sensitive compound and photoresist composition including the same
Infobox
Patent Number
0769589300
Patent Number
769589300
Edits on 22 Mar, 2023
Golden AI
Infobox
Is a
Patent Jurisdiction
Patent Number
076958930
Date of Patent
April 13, 2010
0Patent Application Number
121348400
Date Filed
June 6, 2008
0Official Website
Patent Primary Examiner
Edits on 28 Sep, 2022
Golden AI
Infobox
Is a
Patent Jurisdiction
Patent Number
076958930
Date of Patent
April 13, 2010
0Patent Application Number
121348400
Date Filed
June 6, 2008
0Official Website
Patent Primary Examiner
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US Patent 07695893 Photo-sensitive compound and photoresist composition including the same
Infobox
Is a
Patent jurisdiction
Patent number
07695893
Date of patent
April 13, 2010
Patent application number
12134840
Date Filed
June 6, 2008
Patent primary examiner
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