US Patent 7700048 Apparatus for making carbon nanotube array

An apparatus for making an array of carbon nanotubes includes a reaction chamber and a quartz-boat region. The reaction chamber having a first gas inlet configured for introducing a carbon source gas and a carrier gas thereinto, a second gas inlet configured for introducing a hydrogen gas thereinto, a guiding tube in communication with the second gas inlet, and a gas outlet. The quartz-boat region configured for accommodating a quartz boat for supporting a substrate; wherein the guiding tube extends inwardly a distance sufficient to enable the majority of the introduced hydrogen gas that reaches the substrate not to react with the carbon source gas.