Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Shun Mitarai0
Masahiro Tada0
Date of Patent
April 20, 2010
Patent Application Number
11849584
Date Filed
September 4, 2007
Patent Primary Examiner
Patent abstract
A functional device in which the functional portion is not influenced by events in film forming, and thereby the reliability of the device can be improved is provided. The functional device includes a substrate, one or a plurality of functional portions formed on a surface of the substrate, a sealing layer that forms a space around the functional portion, and has one or a plurality of apertures sealed with a filling material, and one or a plurality of walls formed between the functional portion and the aperture without separating the space.
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