US Patent 7701230 Method and system for ion beam profiling
Patent 7701230 was granted and assigned to Axcelis Technologies on April, 2010 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
April 30, 2007
Date of Patent
April 20, 2010
Patent Application Number
11742178
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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