US Patent 7703892 Printhead integrated circuit having suspended heater elements

A printhead integrated circuit comprising a substrate having a plurality of nozzle assemblies. A nozzle plate has a plurality of nozzles openings defined therein and each nozzle opening corresponds to a respective nozzle assembly. Each nozzle assembly havs a respective nozzle chamber and a heater element positioned in the nozzle chamber. Each heater element is suspended in the nozzle chamber and parallel with a plane of the nozzle plate. The integrated circuit includes drive circuitry for controlling actuation of the heater elements. Each heater element includes solid material having a thickness of at least 0.25 microns and a mass of less than 10 nanograms.