US Patent 7704873 Protective self-aligned buffer layers for damascene interconnects
Patent 7704873 was granted and assigned to Novellus Systems on April, 2010 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
March 20, 2007
Date of Patent
April 27, 2010
Patent Application Number
11726363
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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