US Patent 7705998 Method for evaluating an optical imaging process
Patent 7705998 was granted and assigned to Infineon Technologies on April, 2010 by the United States Patent and Trademark Office.
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Patent abstract
A method includes calculating destructive interference conditions between two linearly s-polarized waves and between two linearly p-polarized waves, respectively, in dependence on varying parameters of the s- and p-polarized waves, representing the destructive interference conditions in a diagram, setting an optical radiation field to be used in the optical imaging process, and comparing the optical radiation field with the diagram.
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US Patent 07705998 Method for evaluating an optical imaging process US Patent 7705998 Method for evaluating an optical imaging process
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Patent Number
0770599800
Patent Number
770599800
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Official Website
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Infobox
Is a
Current Assignee
Patent Jurisdiction
Patent Number
077059980
Date of Patent
April 27, 2010
0Patent Application Number
118540170
Date Filed
September 12, 2007
0Official Website
Patent Primary Examiner
Edits on 27 Sep, 2022
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Infobox
Is a
Current Assignee
Patent Jurisdiction
Patent Number
077059980
Date of Patent
April 27, 2010
0Patent Application Number
118540170
Date Filed
September 12, 2007
0Official Website
Patent Primary Examiner
Edits on 18 Jun, 2022
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US Patent 07705998 Method for evaluating an optical imaging process
Infobox
Is a
Current assignee
Patent jurisdiction
Patent number
07705998
Date of patent
April 27, 2010
Patent application number
11854017
Date Filed
September 12, 2007
Patent primary examiner
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