Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
May 4, 2010
Patent Application Number
10729882
Date Filed
December 5, 2003
Patent Citations Received
Patent Primary Examiner
Patent abstract
Explained, inter alia, is a method in which a workpiece (52) to be processed is fastened to a work carrier (10) by means of a solid (62). The work carrier (10) is made of a porous material, e.g. of porous ceramic. This processing method permits simple manipulation of the wafer during the processing. In addition, the workpiece (52) can be easily separated from the work carrier (10) using a solvent.
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