Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
May 11, 2010
Patent Application Number
11628899
Date Filed
May 27, 2005
Patent Primary Examiner
Patent abstract
A capacitive transducer a first part containing a first set of capacitor plates and a second part relatively movable in a plane to the first part. The second part contains a second set of capacitor plates. Both sets of capacitor plates are built on a substrate, wherein the capacitor plates form a plurality of capacitors. The second part is relatively movable in all six degrees of freedom. One set of the plurality of capacitors measures displacements in a plane and a second set of the plurality capacitors measures displacements perpendicular to the plane.
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