Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Sinnosuke Sekiya0
Setsuo Yamamoto0
Date of Patent
May 11, 2010
0Patent Application Number
101009010
Date Filed
March 20, 2002
0Patent Primary Examiner
Patent abstract
A polishing tool comprising a support member, and polishing means fixed to the support member. The polishing means is composed of felt having a density of 0.20 g/cm3 or more and a hardness of 30 or more, and abrasive grains dispersed in the felt. A polishing method and apparatus involving pressing the polishing means against a surface of a workpiece to be polished, while rotating the workpiece and also rotating the polishing tool.
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