Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Ralph Steiner Vanha0
Tommasso Francesco Cilento0
Date of Patent
May 11, 2010
Patent Application Number
11542875
Date Filed
October 3, 2006
Patent Primary Examiner
Patent abstract
A sensor integrated on a semiconductor device (1), in particular a flow sensor, comprises a measuring element (2) on a membrane (5). In order to prevent a buckling of the membrane (5) a tensile coating (9) is applied. The coating covers the membrane, but it preferably leaves all the active electronic components integrated on the semiconductor chip (1) uncovered, such that their electrical properties are not affected.
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