US Patent 7714406 Low-cost electrostatic clamp with fast de-clamp time
Patent 7714406 was granted and assigned to Axcelis Technologies on May, 2010 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
October 25, 2007
Date of Patent
May 11, 2010
Patent Application Number
11924166
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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