Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Naoto Yokoyama0
Koji Sumi0
Motohisa Noguchi0
Motoki Takabe0
Date of Patent
May 18, 2010
0Patent Application Number
118796280
Date Filed
July 18, 2007
0Patent Primary Examiner
Patent abstract
A piezoelectric device including: a substrate; a lower electrode formed over the substrate; a piezoelectric layer formed over the lower electrode and including lead zirconate titanate; and an upper electrode formed over the piezoelectric layer, the lead zirconate titanate having a half-width of a peak of a (100) plane measured by an X-ray diffraction rocking curve method of 10 degrees or more and 25 degrees or less.
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