Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Date of Patent
May 18, 2010
Patent Application Number
11830182
Date Filed
July 30, 2007
Patent Primary Examiner
Patent abstract
Techniques associated with providing multiple gate insulator thickness for a semiconductor device are generally described. In one example, an apparatus includes a semiconductor fin having an impurity introduced to at least a first side of the fin, a first oxide having a first thickness coupled with the first side of the fin, and a second oxide having a second thickness coupled with a second side of the fin, the second thickness being different from the first thickness as a result of the impurity introduced to the first side of the fin.
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