Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Vinay Shah0
Martin R. Elliott0
Date of Patent
May 18, 2010
0Patent Application Number
112208970
Date Filed
September 6, 2005
0Patent Citations Received
Patent Primary Examiner
Patent abstract
In a first aspect, a first method of mapping contents of a substrate carrier is provided. The first method includes the steps of (1) coupling a sensor to the substrate carrier or a loadport adapted to receive the substrate carrier; and (2) determining a presence or absence of a substrate in a slot of the substrate carrier using the sensor. Numerous other aspects are provided.
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